Full Description

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements ofthe oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elementsthat can be determined by the method are O, C, N, H, P and S.

Cross References:
ISO 14707
ISO 14284
ISO 16962:2017
ISO 5725-2
ISO 5725-1
ISO 5725-6
ISO 9000:2015
ISO/IEC 17025:2017


All current amendments available at time of purchase are included with the purchase of this document.

Product Details

Published: 08/16/2019 ISBN(s): 9780539061345 Number of Pages: 48 File Size: 1 file , 2.9 MB Same As: ISO/TS 25138:2019 Product Code(s): 30401359, 30401359, 30401359